Title:
極端紫外光源におけるターゲット軌道計測
Document Type and Number:
Japanese Patent JP7265981
Kind Code:
B2
Abstract:
A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an interaction between a prior target and a prior radiation pulse in a target space; releasing a current target along a trajectory toward the target space that is at least partly overlapping the extended target region; determining one or more moving properties of the current target when the current target is within the extended target region and after a prior and adjacent target has interacted with a prior radiation pulse in the target space; and if any of the determined one or more moving properties of the current target are outside an acceptable range, then adjusting one or more characteristics of a radiation pulse directed toward the target space.
Inventors:
Price, michael, leslie
Mitrie, mark, joseph
Stinson, Corey, Alan
Mitrie, mark, joseph
Stinson, Corey, Alan
Application Number:
JP2019511943A
Publication Date:
April 27, 2023
Filing Date:
September 12, 2017
Export Citation:
Assignee:
ASM L Netherlands B.V.
International Classes:
G03F7/20; H05G2/00
Domestic Patent References:
| JP2015524599A | ||||
| JP2010514214A | ||||
| JP2007109451A | ||||
| JP2004039927A | ||||
| JP2014086523A | ||||
| JP2015532505A | ||||
| JP2009205953A | ||||
| JP200439927A |
Foreign References:
| US20150189728 | ||||
| US20150208494 | ||||
| WO2016079810A1 | ||||
| CN103217870A | ||||
| WO2011116898A1 | ||||
| US20080197297 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
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