搬送装置の教示方法及び処理システム - 東京エレクトロン株式会社

Title:

搬送装置の教示方法及び処理システム

Document Type and Number:

Japanese Patent JP7413062

Kind Code:

B2

Abstract:

A method and system for teaching a transfer device including a substrate holder and a first detector disposed at the substrate holder is disclosed. The method comprises detecting a vertical position of an object by the first detector while moving the substrate holder in a vertical direction, and setting a teaching position of the substrate holder in the vertical direction based on the detected vertical position of the object; and setting a teaching position of the substrate holder in a horizontal direction based on a horizontal position of the substrate holder at which the substrate holder is detected by a second detector while moving the substrate holder in the horizontal direction, the second detector being disposed at a position different from a position of the transfer device.

Inventors:

Toshiaki Toyomaki

Application Number:

JP2020022758A

Publication Date:

January 15, 2024

Filing Date:

February 13, 2020

Export Citation:

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