Title:
溝に経路指定された光ファイバーによる加熱を含む温度制御装置、基板温度制御システム、電子デバイス処理システム、及び処理方法
Document Type and Number:
Japanese Patent JP6608923
Kind Code:
B2
Abstract:
Substrate temperature control apparatus including groove-routed optical fibers. Substrate temperature control apparatus includes upper and lower members including grooves in one or both, and a plurality of optical fibers routed in the grooves. In one embodiment, the optical fibers are adapted to provide light-based pixelated heating. In another embodiment, embedded optical temperature sensors are adapted to provide temperature measurement. Substrate temperature control systems, electronic device processing systems, and methods including groove-routed optical fiber temperature control and measurement are described, as are numerous other aspects.
Inventors:
Bushie, matthew
Boyd, Wendell Jr.
Jirno, Dmitry A.
Parque, Villadie.
Rice, Michael Earl.
Wolfofski, Leon
Boyd, Wendell Jr.
Jirno, Dmitry A.
Parque, Villadie.
Rice, Michael Earl.
Wolfofski, Leon
Application Number:
JP2017521060A
Publication Date:
November 20, 2019
Filing Date:
June 12, 2015
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/683; G02B6/26; H05B3/00; H05B3/74
Domestic Patent References:
| JP9148258A | ||||
| JP6009187B2 | ||||
| JP2012203270A | ||||
| JP2005284202A | ||||
| JP2011222931A | ||||
| JP2014095800A | ||||
| JP2003172850A |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation