To provide a temperature control method for easily adjusting the substrate internal temperature distribution of a thin type substrate in heat- treating the thin type substrate in a batch type furnace.

In this temperature control method in heat-treating the thin type substrate placed on a setter, in the batch type furnace, a thermometer 5 is installed on the surface of the setter 3, and the temperature of the thin type substrate 1 is controlled on the basis of the setter temperature measured by the thermometer 5.