Title:
TEMPERATURE CONTROL METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2003131745
Kind Code:
A
Abstract:
To provide a temperature control method capable of maintaining the accuracy of control based on the detected value of a temperature sensor substantially constant regardless of a change in an error of measurements of the temperature sensor.
Measured values of thermocouple thermometers 7A, 7B and 7C of and those of radiation thermometers 6, 6A, 6B and 6C of a sheet-feed apparatus are detected as the processing proceeds. A temperature parameter of the sheet-feed apparatus is made to change based on differences between the detected temperature values as the processing proceeds.
Inventors:
NAKANO MINORU
UENO MASAAKI
UENO MASAAKI
Application Number:
JP2002207739A
Publication Date:
May 09, 2003
Filing Date:
July 17, 2002
Export Citation:
Assignee:
HITACHI INT ELECTRIC INC
International Classes:
G01K15/00; G01J5/00; G01J5/02; G05D23/00; G05D23/19; G05D23/27; H01L21/00; H01L21/205; H01L21/31; (IPC1-7): G05D23/27; G01J5/02; G01K15/00; G05D23/00; G05D23/19; H01L21/205; H01L21/31
Attorney, Agent or Firm:
Hisako Ishido (3 outside)