Title:
TEMPERATURE CONTROL SIMULATION METHOD AND DEVICE, AND ACQUISITION METHOD OF TRANSMISSION FUNCTION
Document Type and Number:
Japanese Patent JP3219245
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enable a temperature control algorithm to be developed and a temperature control method to be acquired by a method wherein temperature control simulations of a heating oven are done making a transmission function that indicates a relation between a heater input and a temperature output serve as a transmission function of a temperature system simulating device.
SOLUTION: When a heater 1101 of each zone is inputted, it affects not only the zone where the heater 1101 is located but also the output temperatures of a heater thermocouples 1102 and a cascade thermocouple 1105 provided in other zones. Therefore, a single transmission function that represents the series-type transmission functions of a heater system and an intra-oven system for each zone is obtained by multiplying heater system transmission functions 190-1 to 193-4 by cascade system transmission functions 194-1 to 197-4. A temperature system simulation mounted on a temperature simulating device can be done by giving a parameter such as a gain to a block of the obtained transmission function and connecting an input block and an output block together.
Inventors:
Kazuo Tanaka
Hideto Yamaguchi
Kenzo Urabe
Hideto Yamaguchi
Kenzo Urabe
Application Number:
JP22877098A
Publication Date:
October 15, 2001
Filing Date:
August 13, 1998
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
H01L21/22; G05D23/00; G05D23/19; G06F17/00; G06F19/00; G06G7/48; G06G7/66; G06Q50/00; G06Q50/04; H01L21/00; (IPC1-7): H01L21/22; G05D23/19; G06F17/00; H01L21/00
Domestic Patent References:
| JP9198148A | ||||
| JP10133705A | ||||
| JP7219646A | ||||
| JP1039728A | ||||
| JP944072A | ||||
| JP749650A |
Other References:
【文献】富士総合研究所編「半導体素子設計シミュレータ」,丸善,平成3年8月25日,p1,10
Attorney, Agent or Firm:
Gen Ishido (3 outside)