To obtain a temperature control system and its control method that can perform appropriate temperature control according to the characteristics of a temperature-regulated object without being affected by the temperature distribution generated in the temperature-regulated object.
A temperature control system 21 comprises: temperature regulation means 22 and 23 for performing the temperature regulation of a temperature-regulated object; a plurality of temperature detection means 25 for detecting the temperature of the temperature-regulated object; and control means 24 and 28 for controlling the temperature regulation operation of the temperature regulation means 22 and 23. The control means 24 and 28 calculates a representative temperature dependent on the temperature distribution of the temperature-regulated object from the temperature detected by the plurality of temperature detection means 25, and controls the temperature regulation operation of the temperature regulation means 22 and 23 on the basis of the representative temperature.
MORIZAKI EMI
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Kiyoshi Yasushima
Takanashi Norio
Motoki Shandong
Taku Ogawa
Murata Kensei
Moto Otani
Kentaro Yokoi
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