To effectively perform temperature control over corrosive liquid with reduced problems of a leak, icing, and temperature deviation by forming a thin type subordinate container of a nonmetallic thin-film wall and adding a plate type temperature control means to the thin-film wall, and then only supplying the corrosive liquid in a main container to the subordinate container for the temperature control and then putting it back to the main container.

The main container 1 of a device A contains a necessary amount of corrosive liquid and gas or only corrosive liquid and is formed of anticorrosive resin, etc., which is not corroded by the corrosive liquid and connected to the subordinate container 2 by a circulation path 3. The temperature control means 5 is added to the subordinate container 2. This subordinate container 2 contains the corrosive liquid and controls its temperature, and is formed into a thin type by using the anticorrosive resin so that the temperature is performed with as a less partial difference as possible. Then the part of the subordinate container 2 where the temperature control means 5 is added is formed of a thin film wall 2a formed of nonmetallic anticorrosive resin.