Title:
TEMPERATURE CONTROLLER
Document Type and Number:
Japanese Patent JPH03204011
Kind Code:
A
Abstract:
PURPOSE:To shorten the response time of a 2nd thin film temperature sensor and to omit the attachment of this sensor by providing a 2nd temperature controller which receives the temperature detection signal of the temperature sensor and sends out a control current. CONSTITUTION:A 1st temperature controller 9 performs the rough control of temperature with a Peltier element based on the temperature detection signal of a 1st thin film temperature sensor 3. Meanwhile a 2nd temperature controller 10 feeds back the temperature detection signal received from a 2nd thin film temperature sensor 7 to supply a current to a heater for fine control of the temperature on a temperature control surface. As a result, the quick and a accurate control is attained for the temperature on the temperature control surface.
Inventors:
HIRAOKA ATSUSHI
KOTADO SETSUO
KOTADO SETSUO
Application Number:
JP34357989A
Publication Date:
September 05, 1991
Filing Date:
December 29, 1989
Export Citation:
Assignee:
ANRITSU CORP
International Classes:
H01L31/10; G05D23/19; G05D23/20; G05D23/24; H01S5/042; (IPC1-7): G05D23/19; G05D23/20; G05D23/24; H01L31/10; H01S3/096
Attorney, Agent or Firm:
Ryutaro Koike