Title:
TEMPERATURE DETECTOR AND SEMICONDUCTOR PRODUCTION METHOD AND DEVICE WITH THE USE OF THE DETECTOR
Document Type and Number:
Japanese Patent JP3188991
Kind Code:
B2
Abstract:
PURPOSE: To measure accurately and easily temperature with a fluorescence thermometer using opticalfiber.
CONSTITUTION: In a temperature detector for measuring the temperature of an object 1 to be measured by use of the temperature dependency of luminescence characteristics of a fluorescent body 3 in the case where a cap 4 for protecting the fluorescent body 3 arranged at the tip of an optical fiber 5 on the object side is brought into contact with the object 1 and a pumping light pulse is emitted from a measuring device 8, the optical fiber 5 is separated into the object side and the measuring device side and the optical fiber 5 on the object side is movable to/from the object side by itself by an actuator 7. Thus, the tip of the fluorescence thermometer can be reliably brought into contact with the object 1 and the temperature of the object 1 can be exactly measured.
Inventors:
Manabu Edamura
Master Takahashi
Naoyuki Tamura
Master Takahashi
Naoyuki Tamura
Application Number:
JP11696593A
Publication Date:
July 16, 2001
Filing Date:
May 19, 1993
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
C23F4/00; G01K11/12; G01K11/20; H01L21/302; H01L21/3065; (IPC1-7): G01K11/12; C23F4/00; G01K11/20; H01L21/3065
Domestic Patent References:
| JP498135A | ||||
| JP224342U |
Attorney, Agent or Firm:
Tatsuyuki Unuma