PURPOSE: To cause stable movement of a furnace body through the working of a linear motor by a method wherein a linear motor stator is disposed in parallel to a furnace body, the central part of the one end of which is opened, and a linear motor slider is coupled to the furnace body in a manner to be positioned facing the linear motor stator.

CONSTITUTION: A cartridge 8 filled with a sample 9 is coaxially inserted through the opening part of a furnace body 1 in a casing 11 and the sample 9 is heated by a heater. In movement of the furnace body 1, a linear motor driving current controlled in a reset pattern is transmitted to a linear motor stator 7. In which case, since a linear motor slider 6 is driven through the working of a linear motor, a linear ball slider 4 on which the furnace body 1 is placed is moved over a guide rail 3. In this case, each position of the linear motor slider 6 is detected by a linear encoder 12, and based on a detected signal therefrom, the stop position, the speed, and acceleration of the linear motor slider 6 are controlled.