Title:
温度測定校正と電流測定の方法および装置
Document Type and Number:
Japanese Patent JP4531212
Kind Code:
B2
Abstract:
A calibration current source and methods of calibrating temperature measurements made during, e.g., an RTP process are described. The calibration current source preferably includes a biasing circuit, an output transistor current source, and an offset circuit. The biasing circuit has an input, a reference voltage output and a biasing voltage output. The output transistor current source is coupled to the biasing voltage output and is configured to produce an output current. The offset circuit is coupled in a feedback loop between the reference voltage output and the biasing circuit input and is configured to generate from the reference voltage output a variable offset voltage for selectively controlling the biasing voltage applied to the output transistor current source. In a temperature calibrating method a calibration table is generated by applying a plurality of input signals to a calibration current source to produce a plurality of output signals. The calibration table is stored. When an output signal of a photodetector is received the calibration input signal corresponding to the received photodetector output signal is determined based upon the stored calibration table.
Inventors:
David Blow
Area Jadu Shreva
Area Jadu Shreva
Application Number:
JP2000208832A
Publication Date:
August 25, 2010
Filing Date:
July 10, 2000
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
G01J5/00; H01L21/324; G01J1/18; G01J5/02; G01J5/10; G01J5/52; H01L21/26; H01L21/66
Domestic Patent References:
| JP9297626A | ||||
| JP10098084A | ||||
| JP63035007B2 | ||||
| JP10112614A |
Foreign References:
| WO1996010865A1 | ||||
| US5039888 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Ikeda adult
Junji Kashiwaoka
Yuichi Yamada
Ikeda adult
Junji Kashiwaoka
Yuichi Yamada