Title:
TEMPERATURE MEASUREMENT SYSTEM, BASE PLATE PROCESSOR, AND TEMPERATURE MEASURING METHOD
Document Type and Number:
Japanese Patent JP2017219470
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To expand a temperature range which can be measured without changing the spectrometer resolution.SOLUTION: A temperature measurement system includes: a light source; a splitter; a first input/output unit for outputting light to a first main surface of a measurement object and inputting reflection light from the first main surface and a second main surface; a reference mirror unit having a first reflection surface and a second reflection surface reflecting reference light; a second input/output unit for outputting the reference light from the splitter to the reflection mirror unit and inputting reflection light from the reference mirror unit; a spectroscope connected to the splitter for measuring the distribution of the intensity of the reflection light depending on the wavelength; a light path length calculation unit connected to the spectroscope for calculating a first light path difference between the first main surface and the first reflection surface and calculating a second light path difference between the second main surface and the second reflection surface on the basis of the waveform obtained by Fourier transformation of the distribution of the intensity of the reflection light from the first main surface, the first reflection surface, the second main surface, and the second reflection surface; and a temperature measuring unit for measuring the temperature of the measurement object on the basis of the first light path difference, the second light path difference, and a light path length determined in advance.SELECTED DRAWING: Figure 1
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Inventors:
NAGAI KENJI
Application Number:
JP2016115369A
Publication Date:
December 14, 2017
Filing Date:
June 09, 2016
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
G01K5/52; G01B9/02; H01L21/66
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Junji Kashiwaoka
Omori Tetsuhei
Yoshiki Kuroki
Junji Kashiwaoka
Omori Tetsuhei