To actualize a pressure type flow controller for controlling the rate of an orifice passing flow with high accuracy by simultaneously measuring a fluid pressure and a fluid temperature at a same point in the fluid.
This pressure type flow controller controls the rate of flow passing an orifice by computing Qc = K×P1 with an upstream side pressure assumed as P1 when the flow velocity of a fluid passing through an orifice 4 is at the velocity of sound. The controller is characterized in that an upstream side pressure sensor comprises a resistance element whose electrical resistance varies under pressure and this resistance element as the pressure sensor is simultaneously used as a temperature sensor. In this resistance element, four resistors 41a to 41d are disposed on a pressure receiving surface to form a bridge circuit using the four resistors as four sides. A constant-current power supply 43 is connected between input terminals 42a and 42b of the bridge circuit. A voltage Vp between output terminals 44a and 44b is used to detect a fluid pressure P while a voltage VT between the input terminals is used to detect fluid temperature T, thus causing the resistance element to function as a pressure-temperature sensor 10.
NISHINO KOJI
MATSUMOTO ATSUSHI
DOI RYOSUKE
IKEDA SHINICHI
SUGIYAMA KAZUHIKO
FUJIKIN KK
TOKYO ELECTRON LTD
JPH08338546A | 1996-12-24 | |||
JPS61238529A | 1986-10-23 | |||
JPS62168030A | 1987-07-24 | |||
JPH02242121A | 1990-09-26 | |||
JPS5790107A | 1982-06-04 | |||
JPH08234845A | 1996-09-13 | |||
JPH10267779A | 1998-10-09 | |||
JP2000075931A | 2000-03-14 |
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