Title:
TEMPERATURE MEASURING METHOD AND DVICE THEREFOR
Document Type and Number:
Japanese Patent JP3203936
Kind Code:
B
Abstract:
PURPOSE: To provide a temperature measuring method and a device for measuring the micro area temperature of micrometer order on the surface of a solid sample with accuracy in the contactless state.
CONSTITUTION: When light 5 periodically changed in intensity is converged and irradiated to the temperature measuring position on the surface of a solid, periodic thermal expansion displacement is generated. Probe light 16 is irradiated to this measuring position, and the reflected light is made interfere with reference light. Then intensity of the interference light 95 periodically changes synchronously with the thermal expansion displacement, so that the thermal expansion displacement quantity can be obtained from the intensity change. Since the thermal expansion displacement quantity changes depending on the local temperature of the solid, the local temperature of the temperature measuring position can be inversely computed from the thermal expansion displacement quantity. The intensity modulated light 2 and the probe light 16 are converged in micrometer order, or periodic thermal expansion displacement quantity is measured with high accuracy using the interference light 95, and the temperature is computed from this value. The micro area temperature of micrometer order on the surface of a solid sample 7 can be obtained with high accuracy in the contactless state.
Inventors:
Nakada, Toshihiko
Hirasawa, Shigeki
Saito, Yoko
Ninomiya, Takanori
Nomoto, Mineo
Hirasawa, Shigeki
Saito, Yoko
Ninomiya, Takanori
Nomoto, Mineo
Application Number:
JP1994000048314
Publication Date:
June 29, 2001
Filing Date:
March 18, 1994
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01K5/52; G01J9/00; G01K7/00; G01K5/00; G01J9/00; G01K7/00; (IPC1-7): G01K5/52