Title:
TEMPERATURE MEASURING METHOD, TESTING METHOD USING THE SAME, SEMICONDUCTOR TESTER AND SEMICONDUCTOR CHARACTERISTICS ESTIMATING METHOD
Document Type and Number:
Japanese Patent JP3946964
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To test a wafer at a high accuracy in a screening tester for testing semiconductor elements being energized in the wafer.
SOLUTION: An evaluator 21 evaluates characteristics of e.g. a diode 11a at a known temperature and characteristics at an unknown temperature with the diode 11a energized for its running test. Based on the evaluation result, a control computer 25 estimates the true temperature of the diode 11a in the running test and controls a controller 27 of Peltier coolers 13a-13f, based on the estimation result, to locally control the temperature of a mount base 12 so that the temperatures of all diodes 11a in the wafer 11 are equal, thus enabling the test of all the diodes 11a with the same load.
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Inventors:
Akio Tabata
Application Number:
JP2001078288A
Publication Date:
July 18, 2007
Filing Date:
March 19, 2001
Export Citation:
Assignee:
Toshiba Electronic Engineering Co., Ltd.
Toshiba Corporation
Toshiba Corporation
International Classes:
G01R31/26; H01S5/024; H01L21/66; H01S5/06; (IPC1-7): H01L21/66; G01R31/26; H01S5/024; H01S5/06
Domestic Patent References:
| JP3044949A | ||||
| JP5157632A | ||||
| JP4280447A | ||||
| JP4268466A | ||||
| JP2243948A | ||||
| JP61154192A | ||||
| JP59178742A | ||||
| JP2001021610A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu
Ryo Hashimoto