Title:
温度測定用プローブ、温度測定装置および温度測定方法
Document Type and Number:
Japanese Patent JP5455781
Kind Code:
B2
Inventors:
Kaoru Kojima
Application Number:
JP2010115490A
Publication Date:
March 26, 2014
Filing Date:
May 19, 2010
Export Citation:
Assignee:
Canon Inc
International Classes:
G01K5/66; G01K5/70
Domestic Patent References:
| JP2002357527A | ||||
| JP7325092A |
Foreign References:
| WO2008072714A1 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa