Title:
TEMPERATURE MONITOR
Document Type and Number:
Japanese Patent JP2715903
Kind Code:
B
Abstract:
PURPOSE: To enable high accuracy temperature measurement by measuring gas pressure.
CONSTITUTION: Plural cavities 4 (volume: V1) are formed inside a high heat conductor 3 formed of aluminium, nickel, etc. The cavities 41-45 are connected to micro differential pressure gauges 51-53 through small diameter tubes 91-95 (volume: V2). The respective micro differential pressure gauges 51-53 measure pressure difference between the cavity 43 and the other cavities 41, 42, 44, 45, and a computing means 100 computes temperature distribution on the basis of this pressure difference.
Inventors:
Inaba, Seiichi
Application Number:
JP1994000071446
Publication Date:
November 07, 1997
Filing Date:
March 16, 1994
Export Citation:
Assignee:
NEC CORP
International Classes:
G01K3/00; G01K3/14; G01K5/00; G01K5/28; (IPC1-7): G01K3/14; G01K5/28