To provide a temperature regulator that efficiently regulates a temperature of materials to be finely adjusted to close tolerance of the objective temperature, and also regulates the temperatures even though a region of the temperature of the materials to be adjusted is an infinitesimal region.

The temperature regulator adjusts the temperature of the materials by contacting a heat and cooling unit to the materials whose temperature is adjusted, which comprises a refrigerant flow path of cooling means and a heat resistor of heat means, which are located in the convex structured heat and cooling unit 101 made mainly from the material with the thermal conductivity over 50 W/mK. The regulator provides a thin film resistor 106 and a thermocouple as temperature detective means and can adjust a cooling speed if providing the refrigerant to the refrigerant flow path and applying power to the heat resistor are simultaneously feasible. The structure of heat and cooling unit 101 can be a plane type, concave type, a pool type and a board type except the foregoing convex type.