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Title:
TEMPERATURE SENSOR BY MEMS TECHNOLOGY AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2010217120
Kind Code:
A
Abstract:

To provide a technology for achieving a sensor suitable for monitoring the health and an environment, by being installed on a large number of organism individuals.

A bimorph element is a MEMS device manufactured by a MEMS technology, and is characterized by having two bimorph plates arranged so as to face each other and so that the displacement direction becomes the approaching direction to a mate. Depending on an embodiment, these two bimorph plates may be arranged so that both its plate surfaces become vertical to a bottom and/or a top surface of a substrate for supporting the bimorph plates. Depending on an embodiment, an upper side of the bimorph plates may be arranged so as not to exceed a height of the substrate and so that its lower side does not become lower than a height of the bottom of the substrate.


Inventors:
Cho, Takeshi
Okada, Hironao
Kobayashi, Takeshi
Ito, Hisahiro
Maeda, Ryutaro
Application Number:
JP2009000067117
Publication Date:
September 30, 2010
Filing Date:
March 18, 2009
Export Citation:
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Assignee:
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE & TECHNOLOGY
International Classes:
G01K5/68; B81B3/00; G01K5/66; G01K1/02



 
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