To provide a technology for achieving a sensor suitable for monitoring the health and an environment, by being installed on a large number of organism individuals.
A bimorph element is a MEMS device manufactured by a MEMS technology, and is characterized by having two bimorph plates arranged so as to face each other and so that the displacement direction becomes the approaching direction to a mate. Depending on an embodiment, these two bimorph plates may be arranged so that both its plate surfaces become vertical to a bottom and/or a top surface of a substrate for supporting the bimorph plates. Depending on an embodiment, an upper side of the bimorph plates may be arranged so as not to exceed a height of the substrate and so that its lower side does not become lower than a height of the bottom of the substrate.
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Okada, Hironao
Kobayashi, Takeshi
Ito, Hisahiro
Maeda, Ryutaro
