Title:
TEMPERATURE SENSOR
Document Type and Number:
Japanese Patent JP2015068687
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a bolometer-system temperature sensor that suppresses a trade-off between low resistance and hysteresis, and TCR.SOLUTION: A temperature sensor has a bolometer thin film 20 formed by using a bolometer material, and detects a temperature change when an electromagnetic wave is absorbed as a change in a resistance value of the bolometer thin film. The bolometer thin film is mainly composed of vanadium oxide (IV), and a first element and a second element that can form vanadium and an alloy are added. The first element has a greater valence than vanadium while the second element has a smaller valence than vanadium.
Inventors:
MIYAZAKI KENICHI
WADO HIROYUKI
SUZUKI YOSHIMI
SHIBUYA KEISUKE
TOMIOKA YASUHIDE
SAWA AKIHITO
WADO HIROYUKI
SUZUKI YOSHIMI
SHIBUYA KEISUKE
TOMIOKA YASUHIDE
SAWA AKIHITO
Application Number:
JP2013201759A
Publication Date:
April 13, 2015
Filing Date:
September 27, 2013
Export Citation:
Assignee:
DENSO CORP
NAT INST OF ADV IND & TECHNOL
NAT INST OF ADV IND & TECHNOL
International Classes:
G01J5/20; H01L35/22; H01L37/00
Domestic Patent References:
| JP2001183236A | 2001-07-06 | |||
| JP2004288767A | 2004-10-14 | |||
| JP2002020199A | 2002-01-23 | |||
| JP2000143243A | 2000-05-23 |
Foreign References:
| WO2011118700A1 | 2011-09-29 | |||
| US20050167592A1 | 2005-08-04 | |||
| US20110248167A1 | 2011-10-13 |
Attorney, Agent or Firm:
Kazuyuki Yahagi
Taihei Nonobe
Takanori Kubo
Taihei Nonobe
Takanori Kubo