Title:
TEMPLATE, METHOD FOR MANUFACTURING TEMPLATE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2023140145
Kind Code:
A
Abstract:
To provide a template capable of forming alignment marks that enable high-precision alignment.SOLUTION: A template comprises: a substrate having a first surface, a first pattern having a second surface protruding with respect to the first surface, the first pattern including a first recess and a second recess on the second surface, and a second pattern having a third surface protruding with respect to the first surface; and an optical layer in the first recess. The template has a bottom surface of the second recess exposed.SELECTED DRAWING: Figure 4
Inventors:
FUKUHARA KAZUYA
TAKAHATA KAZUHIRO
TAKAHATA KAZUHIRO
Application Number:
JP2022046028A
Publication Date:
October 04, 2023
Filing Date:
March 22, 2022
Export Citation:
Assignee:
KIOXIA CORP
International Classes:
H01L21/027; B29C59/02
Attorney, Agent or Firm:
Sakura International Patent Office