To provide a terahertz camera additionally using a pyroelectric detector that detects a terahertz wave having wavelength of 100-1000 μm, reflecting a detection principle that polarization quantity of a pyroelectric body material changes according to temperature, protecting a capacitor from a reducing gas, and preventing heat from dissipating from a pyroelectric detection element, so as to realize higher detection characteristics.
A pyroelectric detector 200 comprises: a pyroelectric detection element 220 including a capacitor 230 with polarization quantity variable according to temperature, and a first reducing gas barrier film 240 configured to protect the capacitor from a reducing gas; a support member 210 with the pyroelectric detection element mounted thereon; a support part 104 supporting a part of the support member to thermally separate the pyroelectric detection element. The support member includes a mount member 210A on which the capacitor is mounted; and an arm member 210B connected to the mount member. The first reducing gas barrier film 240 is formed with an isolated pattern having a third peripheral line P3 between a first peripheral line P1 of the mount member 210A and a second peripheral line P2 of the capacitor 230.
| JPS601527 | PHOTOSENSOR |
| JP2011153871A | 2011-08-11 | |||
| JP2011203168A | 2011-10-13 | |||
| JP2007248140A | 2007-09-27 | |||
| JP2011153871A | 2011-08-11 | |||
| JP2011153853A | 2011-08-11 |
Osamu Suzawa
Kazuhiko Miyasaka
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