Title:
TERAHERTZ WAVE DETECTING APPARATUS, CAMERA, IMAGING APPARATUS, AND MEASURING APPARATUS
Document Type and Number:
Japanese Patent JP2014235145
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a terahertz wave detecting apparatus that can accurately convert into electric signals even when detecting a terahertz wave.SOLUTION: A terahertz wave detecting apparatus comprises a base plate 2 and a plurality of first detection elements 9 arrayed on the base plate 2. Each of the first detection elements 9 has a first metal layer 21 disposed on the base plate 2, a supporting base plate 26 disposed at a distance from the first metal layer 21, a dielectric layer 31 that absorbs the terahertz wave to generate heat, and a converter 35 that is disposed on the dielectric layer 31 by stacking a second metal layer 32, a pyroelectric layer 33 and a third metal layer 34 and converts the heat generated by the dielectric layer 31 into electric signals.
Inventors:
TOMIOKA HIROTO
Application Number:
JP2013118564A
Publication Date:
December 15, 2014
Filing Date:
June 05, 2013
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01J1/02; G01N21/3581; H01L27/144; H01L37/02; H04N5/225; H04N5/369
Domestic Patent References:
| JP2012173235A | 2012-09-10 | |||
| JPH05206526A | 1993-08-13 |
Attorney, Agent or Firm:
Masaaki Kamiyanagi
Kazuhiko Miyasaka
Kazuaki Watanabe
Kazuhiko Miyasaka
Kazuaki Watanabe