Title:
TERAHERTZ WAVE DETECTING APPARATUS, CAMERA, IMAGING APPARATUS, AND MEASURING APPARATUS
Document Type and Number:
Japanese Patent JP2014235146
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a terahertz wave detecting apparatus that can accurately convert a terahertz wave into electric signals.SOLUTION: A terahertz wave detecting apparatus comprises a base plate 2 and a plurality of first detection elements 9 arrayed above the base plate 2. Each of the first detection elements 9 has an absorber 42 that absorbs a terahertz wave 15 to generate heat and a converter 34 that converts the heat generated by the absorber 42 into electric signals. The absorber 42 has a dielectric layer 40, a first metal layer 41 disposed on one face of the dielectric layer 40 and a second metal layer 33 disposed on the other face of the dielectric layer 40, and the plurality of first detection elements 9 are so arrayed that the terahertz wave 15 diffracted between adjoining absorbers 42 is brought to incidence on the dielectric layer 40.
Inventors:
TOMIOKA HIROTO
Application Number:
JP2013118565A
Publication Date:
December 15, 2014
Filing Date:
June 05, 2013
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01J1/02; G01N21/3581; H01L27/144; H01L37/02; H04N5/225; H04N5/369
Domestic Patent References:
| JP2012173235A | 2012-09-10 | |||
| JPH1144583A | 1999-02-16 |
Attorney, Agent or Firm:
Masaaki Kamiyanagi
Kazuhiko Miyasaka
Kazuaki Watanabe
Kazuhiko Miyasaka
Kazuaki Watanabe