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Title:
TERAHERTZ WAVE DETECTION APPARATUS, CAMERA, IMAGING DEVICE, AND MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2014163674
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a terahertz wave detection apparatus which suppresses deterioration of detection sensitivity due to electrical noise.SOLUTION: A terahertz wave detection apparatus 100 comprises: an absorption unit 60 absorbing a terahertz wave to generate heat; and a conversion unit 30 converting heat generated by the absorption unit 60 into an electric signal. The absorption unit 60 includes: a dielectric layer 62; a plurality of metal structures 64 provided on one surface 62a of the dielectric layer 62 and arranged separated from each other at a cycle with a predetermined length; and a metal layer 36 provided on the other surface 62b of the dielectric layer 62. The cycle with a predetermined length of the metal structure 64 is smaller than the wavelength of the terahertz wave absorbed by the absorption unit 60.

Inventors:
TOMIOKA HIROTO
Application Number:
JP2013031789A
Publication Date:
September 08, 2014
Filing Date:
February 21, 2013
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
G01J1/02; G01N21/3581; H01L27/144; H01Q17/00
Foreign References:
Other References:
JPN7017000005; Fabio Alves et al.: 'Strong terahertz absorption using SiO2/Al based metamaterial structures' Applied Physics Letters 100, 2012, 111104
Attorney, Agent or Firm:
Masaaki Kamiyanagi
Kazuhiko Miyasaka
Kazuaki Watanabe