Title:
Terahertz wave phase contrast measurement system
Document Type and Number:
Japanese Patent JP6182471
Kind Code:
B2
Abstract:
In order to provide a high-sensitivity terahertz wave phase difference measurement system having a high S/N ratio, terahertz interference waves are observed using a half mirror and a movable reference mirror, and the phase difference is calculated, by a terahertz wave generation/detection device that obtains a high S/N ratio by employing a terahertz wave generator for irradiating a non-linear optical crystal with angular phase-matched pump light and seed light, and a terahertz wave detector for irradiating a non-linear optical crystal with angular phase-matched pump light and terahertz waves. In order to match the optical path length of the pump light and the terahertz waves irrespective of the position of the movable reference mirror and the position of a measured object, a first optical delay device, and a second optical delay device that operates in conjunction with movement of a movable reference mirror of a Michelson interferometer, are introduced on the optical path of the pump light.
Inventors:
Nobuhiro Shiramizu
Application Number:
JP2014021836A
Publication Date:
August 16, 2017
Filing Date:
February 07, 2014
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01N21/3581; G01B9/02; G01J9/02; G01N21/41
Domestic Patent References:
| JP2008116439A | ||||
| JP2009300279A | ||||
| JP2011075583A |
Foreign References:
| US20080074674 |
Other References:
HAYASHI,S. et.al.,“High-peak-power and tunable terahertz-wave generation and sensitive detection by using nonlinear p,37th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz),2012年 9月,3 Pages,* 図3 *
TAKIDA,Y. et.al.,“Coherent electro-optical detection of THz-wave generated from synchronously pumped picosecond THz,Proceedings of SPIE,2012年 2月15日,Article 82400A, 6 Pages,* 図1 *
四方潤一 他 SHIKATA,J. et.al.,“THz波パラメトリック発生光を用いたフーリェ分光光度計”“Fourier transform THz-wave spectrometer usi,電子情報通信学会技術研究報告 IEICE Technical Report,2000年10月 6日,Volume 100, Number 349,Pages 31-36,* 図8 *
五十川貴之 他 ISOGAWA,T. et.al.,“光技術による低コヒーレンス・テラヘルツ波を用いたトモグラフィ”“Tomographic Imaging Using Photonic,2012年電子情報通信学会総合大会講演論文集PROCEEDINGS OF THE 2012 IEICE GENERAL CONFERENCE,2012年 3月 6日,エレクトロニクス(1) ELECTRONICS(1),Article C-14-17, Page 298
TAKIDA,Y. et.al.,“Coherent electro-optical detection of THz-wave generated from synchronously pumped picosecond THz,Proceedings of SPIE,2012年 2月15日,Article 82400A, 6 Pages,* 図1 *
四方潤一 他 SHIKATA,J. et.al.,“THz波パラメトリック発生光を用いたフーリェ分光光度計”“Fourier transform THz-wave spectrometer usi,電子情報通信学会技術研究報告 IEICE Technical Report,2000年10月 6日,Volume 100, Number 349,Pages 31-36,* 図8 *
五十川貴之 他 ISOGAWA,T. et.al.,“光技術による低コヒーレンス・テラヘルツ波を用いたトモグラフィ”“Tomographic Imaging Using Photonic,2012年電子情報通信学会総合大会講演論文集PROCEEDINGS OF THE 2012 IEICE GENERAL CONFERENCE,2012年 3月 6日,エレクトロニクス(1) ELECTRONICS(1),Article C-14-17, Page 298
Attorney, Agent or Firm:
Yuji Toda