TERAHERTZ WAVEGUIDE CIRCUIT

Japanese Patent JP2017005631

A

PROBLEM TO BE SOLVED: To solve a problem that a waveguide manufacturing technology for terahertz wave suitable for mass production does not exist yet, in particular, since a short side of a waveguide substantially becomes as long as several hundred μm in a terahertz wave domain in a frequency lower than 1 THz, a problem relating to a processing depth in forming the waveguide may be severe and become a considerable obstruction in realizing an integrated circuit for terahertz wave.SOLUTION: In a terahertz waveguide circuit, a waveguide of a hollow structure is formed by bonding two substrates, such that the depth of a groove required to be formed may become half of the prior arts. A processing displacement amount during groove formation can be suppressed by half. Thus, in a filter that is manufactured by utilizing the waveguide of the hollow structure, central wavelength displacement is suppressed by half and a waveguide circuit in which a reflection attenuation amount is suppressed can be realized. Further, a problem that the waveguide circuit s cracked by thermal shock during processing of the groove or vibration shock during use can also be avoided. An Si substrate or the like that is thinner and more inexpensive can be selected and a waveguide circuit for terahertz wave domain at a lower frequency side may also be realized.SELECTED DRAWING: Figure 1

OGUMA MANABU
ITOU MIKITAKA
GO TAKASHI
ASAKAWA SHUICHIRO
TAKAHASHI HIROSHI

JP2015120611A

January 05, 2017

June 15, 2015

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NIPPON TELEGRAPH & TELEPHONE
SOPHIA SCHOOL CORP

H01P3/123; G02B6/122; H01P11/00; H01Q13/02; H01Q13/06

Patent Business Corporation Tani/Abe Patent Office

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