To provide a test device capable of very efficiently recording log data which show the state of device and state of test, etc., before/after the time when abnormality occurs, by effectively utilizing a limited memory capacity, and to provide a recording method of the log data of the test device.

In the test device comprising a plurality of units for executing a test program with respect to a sample while continuously monitoring the state of each unit and communication state between each of the units, the log data are recorded on a memory when at least any one of the state of each unit and the communication state between each of the units is changed in the state.