Title:
【発明の名称】検査装置
Document Type and Number:
Japanese Patent JP2806403
Kind Code:
B2
Inventors:
Shigeru Hirata
Yuji Hasumoto
Sugiura Atsushi
Yuji Hasumoto
Sugiura Atsushi
Application Number:
JP24293991A
Publication Date:
September 30, 1998
Filing Date:
September 24, 1991
Export Citation:
Assignee:
New Cosmos Electric Co., Ltd.
International Classes:
F04B49/06; G05D7/06; G05D16/20; G05D21/00; (IPC1-7): G05D7/06; F04B49/06; G05D16/20
Domestic Patent References:
| JP55174611U |
Attorney, Agent or Firm:
Shuichiro Kitamura (1 person outside)