Title:
TEST HANDLER CONTACT PIN CONNECTION STRUCTURE
Document Type and Number:
Japanese Patent JPH0547863
Kind Code:
A
Abstract:
PURPOSE: To improve uniformity and durability of a contact load in a characteristic inspection of a semiconductor element.
CONSTITUTION: A tester cable 2 is formed to an L-shape which is connected to a contact pin 1 at an angle of about 90°. Thereby, it is possible to eliminate interference between cables generated near a connection part between a contact pin and a tester cable, and stress on the cables.
Inventors:
YASHIRO MASAKAZU
IJICHI TOSHIYA
IJICHI TOSHIYA
Application Number:
JP22843691A
Publication Date:
February 26, 1993
Filing Date:
August 12, 1991
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L21/66; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Hiroshi Murakami (1 outside)
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