Title:
TEST METHOD FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2002197892
Kind Code:
A
Abstract:
To store data for each cell such as a memory test.
In a test method for a semiconductor device in which measurement is performed for a plurality of cells varying measurement conditions and a plurality of measuring points deciding success or failure of the semiconductor device from obtained data of each cell are set, difference data of data of each cell between continuous measuring points of the plurality of measuring point are obtained, and the difference data are stored. Capacity of stored data is reduced by making the stored data as difference data of data of each cell, and storing data for each cell can be performed.
Inventors:
KAWAKAMI MASAMI
MIYATA SEISHI
EGUCHI TAKANORI
YAJIMA HIRONOBU
AOKI HIDEYUKI
MIYATA SEISHI
EGUCHI TAKANORI
YAJIMA HIRONOBU
AOKI HIDEYUKI
Application Number:
JP2000396654A
Publication Date:
July 12, 2002
Filing Date:
December 27, 2000
Export Citation:
Assignee:
HITACHI LTD
HITACHI ULSI SYS CO LTD
HITACHI ULSI SYS CO LTD
International Classes:
G11C29/00; G11C29/44; G01R31/28; (IPC1-7): G11C29/00; G01R31/28
Attorney, Agent or Firm:
Akita Aki