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Patent Searching and Data


Title:
TESTING DEVICE FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH0384482
Kind Code:
A
Abstract:

PURPOSE: To enhance efficiency for a testing process of IC by providing a fixing table, upper cap having suction means whereby an object to be tested is held with suction, and movable table elastically abutted to the fixing table.

CONSTITUTION: A recessed part 15 is provided on the fixing table 2 and the movable table 5 is incorporated in the recessed part 15 all around its surface. A cylinder 16 wherein legs 51 of movable table 5 are to be fitted, is provided at the bottom of recessed part 15, and the movable table 5 is elastically energized by putting a spring 17 in the bottom of this cylinder 16 so that the movable table 5 is pushed-up upward. So, a tip terminal of pagopin 11 is not always made bare. On the other hand, when the upper cap holding the object to be tested on the specified position with vacuum suction at the opening time is abutted to the movable table 5, the hold with absorption is released, and at the same time the object is made to place by the upper cap, on the specified position of movable table.


Inventors:
KOIKE NAOYUKI
Application Number:
JP22214989A
Publication Date:
April 10, 1991
Filing Date:
August 28, 1989
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L21/66; G01R31/26; (IPC1-7): G01R31/26; H01L21/66
Attorney, Agent or Firm:
Sadaichi Igita