To provide a thermal barometric pressure sensor which has barometric pressure sensing sensitivity, including barometric pressure of atmospheric pressure or higher and wide-range vacuum, ranging from low-vacuum region to high-vacuum region by improving the detection sensitivity in the low-vacuum region and the high-vacuum region.
The thermal barometric pressure sensor comprises a thin-film temperature sensor which is provided on a thermally-isolated thin film (for example, a cantilever) and a thin-film heater for heating the thin-film temperature sensor. The thin-film temperature sensor or both the thin-film temperature sensor and the thin-film heater are made to vibrate by an excitation means. By making the degree of thermal contact, of at least the thin-film temperature sensor with an ambient gas (gas under measurement) increased, and heat radiation promoted, and the barometric pressure sensing sensitivity, extending from the barometric pressure of atmospheric pressure or higher, to the high-vacuum region is improved.
MIYAGAWA HISAYUKI
TERADA TOMOYUKI
HONMA KOJI
TECHNO FINE KK
MEMS CORE CO LTD
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