Title:
懸架状態に固定された吸収膜を備えた熱電磁放射検出器
Document Type and Number:
Japanese Patent JP5291859
Kind Code:
B2
Abstract:
The bolometer has an absorbing membrane (1) fixed, by two thermal insulating support units, on a front side of a substrate (2) having two connection terminals (3) integrated with bases of respective posts (8). Each unit has a bridge with a raised zone (7) and two lower ends (6) fixed to upper parts of the post. The membrane has in its plane lower side, two flat electric conductors (10) that directly contact the raised zones. The support units are arranged between the substrate and the membrane. The terminals are electrically connected to the membrane. An independent claim is also included for a method for manufacturing a bolometer.
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Inventors:
Jean-Jack, Aeon
Astrid, Astier
Michelle, Billen
Astrid, Astier
Michelle, Billen
Application Number:
JP2005270734A
Publication Date:
September 18, 2013
Filing Date:
September 16, 2005
Export Citation:
Assignee:
Comisaria Allenergy Atomic Eo Energy Alternative
International Classes:
H01L27/144; G01J5/10; G01J5/20; H01L37/00
Domestic Patent References:
| JP2000146686A | ||||
| JP7324978A | ||||
| JP10185681A |
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Takahashi
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Takahashi
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