THERMAL ELECTROMAGNETIC WAVE DETECTING ELEMENT, MANUFACTURING METHOD THEREOF, THERMAL ELECTROMAGNETIC WAVE DETECTOR, AND ELECTRONIC APPARATUS

Title:

THERMAL ELECTROMAGNETIC WAVE DETECTING ELEMENT, MANUFACTURING METHOD THEREOF, THERMAL ELECTROMAGNETIC WAVE DETECTOR, AND ELECTRONIC APPARATUS

Document Type and Number:

Japanese Patent JP2013171020

Kind Code:

A

Abstract:

To provide a thermal electromagnetic wave detecting element which is easy to manufacture.

A thermal electromagnetic wave detecting element 1 includes: a detection part 5 having a bottom electrode 511 and an upper electrode 513; a base plate 2 having a recess 221 which opens upward; a membrane 4 which is located on an upper surface side of the base plate 2, which is supported by the base plate 2, and which supports the detection part 5 in such a manner that the detection part 5 overlaps with the recess 221; a light reflection film 3 having light reflectivity and conductivity, which is embedded in the base plate 2, which is exposed from the recess 221 to the inside of the recess 221, and whose exposed portion is arranged in a manner to face to the detection part 5. The light reflection film 3 is electrically connected to the bottom electrode 511.

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Inventors:

NODA TAKASHI

Application Number:

JP2012037115A

Publication Date:

September 02, 2013

Filing Date:

February 23, 2012

Export Citation:

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Assignee:

SEIKO EPSON CORP

International Classes:

G01J1/02; G01J5/48; H01L37/02

Domestic Patent References:

JP2010127891A	2010-06-10
JP2005351857A	2005-12-22

Attorney, Agent or Firm:

Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka

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