Title:
熱式ガスセンサ
Document Type and Number:
Japanese Patent JP5055349
Kind Code:
B2
Abstract:
The present invention provides a high-responsiveness and high-accuracy thermal gas sensor configured to enable gas to be analyzed based on a variation in heat conductivity. The thermal gas sensor includes a substrate 2 with a cavity portion 5, a thin-film support 6 stacked in the cavity portion and comprising a plurality of insulating layers 8a and 8b, and a first heating member 3 and a second heating member 4 both sandwiched between the insulating layers in the thin-film support. The second heating member 4 is located around a periphery of the first heating member 3. The first heating member 3 is controlled to a temperature higher than a temperature to which the second heating member 4 is controlled. The concentration of ambient gas is measured based on power applied to the first heating member 3.
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Inventors:
Hiroshi Nakano
Masamichi Yamada
Masahiro Matsumoto
Keiji Hanzawa
Masamichi Yamada
Masahiro Matsumoto
Keiji Hanzawa
Application Number:
JP2009296665A
Publication Date:
October 24, 2012
Filing Date:
December 28, 2009
Export Citation:
Assignee:
Hitachi Automotive Systems, Ltd.
International Classes:
G01N25/18; G01F1/684
Domestic Patent References:
| JP2005504291A | ||||
| JP2007248220A | ||||
| JP3343801B2 | ||||
| JP2003254929A | ||||
| JP2001165731A | ||||
| JP2008020193A |
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Yuji Toda