Title:
THERMAL HEAD AND HEAT TREATMENT EQUIPMENT
Document Type and Number:
Japanese Patent JP2007115926
Kind Code:
A
Abstract:
To provide a thermal head and heat treatment equipment arranged such that a heat treatment article can be heat treated instantaneously while reducing energy consumption.
In a holding structure 3, a light absorbing/heat generating body 4 composed of carbon and generating heat by absorbing light energy is arranged in contact with a heat treatment article 1 or on the side opposite to the heat treatment article 1. The light absorbing/heat generating body 4 is irradiated with light and the temperature is raised instantaneously.
Inventors:
SAMEJIMA TOSHIYUKI
SANO NAOKI
SANO NAOKI
Application Number:
JP2005306399A
Publication Date:
May 10, 2007
Filing Date:
October 20, 2005
Export Citation:
Assignee:
UNIV TOKYO AGRICULTURE
HIGHTEC SYSTEMS CORP
HIGHTEC SYSTEMS CORP
International Classes:
H01L21/324
Domestic Patent References:
JP2004509472A | 2004-03-25 | |||
JP2005235874A | 2005-09-02 | |||
JP2001210631A | 2001-08-03 | |||
JPS5974619A | 1984-04-27 | |||
JP2005129385A | 2005-05-19 |
Attorney, Agent or Firm:
Yoshitsuno Kakuda
Hitoshi Ito
Hitoshi Ito