Title:
THERMAL HYSTERESIS DETECTOR
Document Type and Number:
Japanese Patent JP3170341
Kind Code:
B
Abstract:
PURPOSE: To obtain the highly accuracy for the measured accuracy of indicated temperature by forming a molded body of an unbaked ceramic molded body so that AlN is the main body, a binder is contained in the molded body and the amount of cation metals other than Al is a specified amount or less.
CONSTITUTION: In a thermal hysteresis detector 10, chord parts 12 and 12, which are in parallel with a disk body, are formed, measuring surfaces 11 and 11 having the excellent roundness are formed as the arc parts, a recess part 13, which distinguishes the upper and rear surfaces, is formed in one surface, and chamfered parts 14 are provided at the corner parts of the upper and lower surfaces. Furthermore, the main body of the detection is AlN. The molded body 10 contains a binder of 2-20wt.%. The total of cation metals other than Al is 0.3wt.% or less. The amount of oxygen after degreasing is 0.4-5wt.% and the amount of carbon is 0.5wt.% or less in this composition. The detector is an unbaked ceramic compact. The relationship between the size after baking and the baking temperature is formed as a conversion table. The size after the baking is measured, and the indicated temperature is obtained from the conversion table. The measuring accuracy of the indicated temperature can be made accurate as high as ±2°C. Even if the baking conditions are changed, the baking step can be strictly controlled.
Inventors:
Okawa, Yoshihiro
Application Number:
JP1992000107666
Publication Date:
March 16, 2001
Filing Date:
April 27, 1992
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
C04B35/581; C04B35/58; G01K5/48; G01K11/06; C04B35/581; C04B35/58; G01K5/00; G01K11/00; (IPC1-7): G01K5/48; C04B35/581; G01K11/06
Previous Patent: PRODUCTION OF COMPOSITE SILICA GLASS TUBE FOR HEAT TREATMENT OF SEMICONDUCTOR
Next Patent: PLANAR HEATING DEVICE
Next Patent: PLANAR HEATING DEVICE