To provide a thermal infrared detector which has high infrared measurement accuracy, is small, is lightweight, and is inexpensive, by cutting off infrared radiation incoming from the surroundings that becomes a disturbance.
The infrared detector 2 is housed in a vacuum vessel 3 having an infrared incoming opening 4. A micro shield 10 is erected on the infrared detector 2 so that pixels, arranged in an array form, are partitioned. The height of the micro shield 10 is set so that it is larger than the thickness, in the direction of connecting the pixels and that infrared radiation from parts other than the infrared incoming opening 4 is cut off. The temperature of the micro shield 10 is kept fixed by an electronic cooling element 7. An external connection terminal 9, which can be electrically connected to the exterior and the infrared detector 2, are connected directly to one bonding wire 19.
JPH05264342A | 1993-10-12 | |||
JPH09218086A | 1997-08-19 | |||
JP2000292253A | 2000-10-20 | |||
JPH0510816A | 1993-01-19 | |||
JPH0735619A | 1995-02-07 |
Kimura Mitsuru