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Title:
THERMAL INFRARED SENSOR
Document Type and Number:
Japanese Patent JP2005315723
Kind Code:
A
Abstract:

To provide a thermal infrared sensor extremely superior in sensitivity and responsiveness by substantially reducing both transmittance and reflectance by an infrared absorption film and substantially raising an infrared absorption coefficient.

A thermal insulating membrane 4 is formed in the upper surface of a cavity part 6 provided for a silicon substrate 2. A thermocouple 5 for outputting thermoelectromotive force according to temperature changes with the incidence of infrared rays is arranged on the membrane 4. The surface 7a of the infrared absorption film 7 which coats the thermocouple 5 is roughened. The roughened surface 7a of the infrared absorption film 7 is coated with a reflection suppressing film 8 made of a photosensitive organic membrane such as a negative resist material in which an infrared absorption material such as carbon black of approximately 3 wt% is mixed.


Inventors:
Ido, Takuya
Application Number:
JP2004000133846
Publication Date:
November 10, 2005
Filing Date:
April 28, 2004
Export Citation:
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Assignee:
HORIBA LTD
International Classes:
G01J1/02; F24F11/02; G01J5/02; G01J5/12; G01J5/20; G01J5/34; H01L35/32; H01L37/00; (IPC1-7): G01J1/02; G01J5/02; H01L35/32; H01L37/00