Title:
熱式センサおよびその設置方法ならびにマスフローメータ
Document Type and Number:
Japanese Patent JP4005823
Kind Code:
B2
Inventors:
Kimura Mira
Keizo Sugimoto
Keizo Sugimoto
Application Number:
JP2002060650A
Publication Date:
November 14, 2007
Filing Date:
March 06, 2002
Export Citation:
Assignee:
HORIBA STEC Co., Ltd.
IBIDEN CO.,LTD.
IBIDEN CO.,LTD.
International Classes:
G01F1/69; G01F1/692; G01F1/684
Domestic Patent References:
| JP10038652A | ||||
| JP11051953A |
Attorney, Agent or Firm:
Hideo Fujimoto