Title:
THERMAL TREATMENT APPARATUS FOR GLASS SUBSTRATE
Document Type and Number:
Japanese Patent JP2003262469
Kind Code:
A
Abstract:
To provide a thermal treatment apparatus for a glass substrate of high production efficiency in spite of a low-cost energy-saving type.
In this thermal treatment apparatus A for a glass substrate, the glass substrates 2 which are heated bodies, can be enclosed and disposed in multiple stages in a box-shaped heating furnace body 1, and heaters 3 are disposed almost on the whole inside of the heating furnace body. In this constitution, an air agitation fan 50 is provided at a sidewall on one side of the heating furnace body.
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Inventors:
IWATANI NOBUO
WADA HIROAKI
WADA HIROAKI
Application Number:
JP2002060360A
Publication Date:
September 19, 2003
Filing Date:
March 06, 2002
Export Citation:
Assignee:
SHOWA MFG
International Classes:
G02F1/13; F27B5/16; F27D7/04; G02F1/1333; (IPC1-7): F27B5/16; F27D7/04; G02F1/13; G02F1/1333
Attorney, Agent or Firm:
Kenichiro Matsuo (1 outside)
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