THERMAL TREATMENT APPARATUS - KOYO THERMO SYS KK

Title:

THERMAL TREATMENT APPARATUS

Document Type and Number:

Japanese Patent JP2017106714

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To enable easy adjustment of high temperature airflow in a thermal treatment apparatus.SOLUTION: A thermal treatment apparatus 1 has a passage 15, a shutter member 8, and an operation device 9. The passage 15 is configured so that a heated gas can pass through. The shutter member 8 is provided to adjust airflow A1 passing through the passage 15 toward a processing chamber 5 where a workpiece 200 can be placed. The operation device 9 is provided to operate the shutter member 8 from the outside of the passage 15.SELECTED DRAWING: Figure 1

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Inventors:

NAKANISHI HIRONARI
KASATSUGU KATSUNAO
IWANO KENJI
URASAKI YOSHIHIKO
IKEDA SHINICHI

Application Number:

JP2017023405A

Publication Date:

June 15, 2017

Filing Date:

February 10, 2017

Export Citation:

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