Title:
THERMAL TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2021063597
Kind Code:
A
Abstract:
To provide a thermal treatment apparatus capable of sufficiently exhausting gas generated in a thermal treatment section through an exhaust port provided in the thermal treatment section.SOLUTION: A thermal treatment apparatus 1 of this invention subjects a workpiece 10 to thermal treatment in a thermal treatment section 23 in a furnace body 2. The thermal treatment apparatus comprises: a heat-generated gas concentration measurement unit 3 that measures a concentration in the thermal treatment section 23 of heat-generated gas generated during the thermal treatment; an exhaust port 26 provided in the thermal treatment apparatus 23 and that exhausts the heat-generated gas to an outside of the furnace body 2; and an exhaust gas supply unit 4 that supplies, to the thermal treatment section 23, the exhaust gas that exhausts the heat-generated gas through the exhaust port 26. When the concentration of the heat-generated gas measured by the heat-generated gas concentration measurement unit 3 is high, a flow rate of the exhaust gas supplied by the exhaust gas supply unit 4 is increased compared to when the concentration of the heat-generated gas is low.SELECTED DRAWING: Figure 1
Inventors:
SHIBATA EIJI
Application Number:
JP2019186800A
Publication Date:
April 22, 2021
Filing Date:
October 10, 2019
Export Citation:
Assignee:
TOYOTA MOTOR CORP
International Classes:
F27B9/40; F27D21/00
Attorney, Agent or Firm:
Ken Ieiri