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Patent Searching and Data


Title:
THERMAL TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2001358084
Kind Code:
A
Abstract:

To provide a thermal treatment device which does not require a loading area or a lift mechanism below a processing vessel, can be reduced in height, made simple in structure, and improved in processing.

A holder 1 holds works W disposed at a prescribed interval in a vertical direction and is housed in a processing vessel 3 to process the works W as prescribed, an opening 9 is provided to the side wall of the processing chamber 3 to load or unload the holder 1 into or from the chamber 3, an openable lid 10 is provided to hermetically stop up the opening 9, a gas inlet 4 and a gas exhaust vent 5 are provided to the processing vessel 3, and heaters 15 and 16 of resistance heating elements are provided around the processing vessel 3 and inside the lid 10 to heat the works W inside the processing vessel.


Inventors:
SAITO YUKIMASA
SAITO TAKANORI
Application Number:
JP2000178742A
Publication Date:
December 26, 2001
Filing Date:
June 14, 2000
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
F27D3/00; F27B5/04; F27B5/06; F27B5/14; F27B5/16; F27D7/02; H01L21/205; H01L21/22; (IPC1-7): H01L21/22; F27B5/04; F27B5/06; F27B5/14; F27B5/16; F27D3/00; F27D7/02; H01L21/205
Attorney, Agent or Firm:
Noriyuki Kanasaka