Title:
THERMAL TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2016186416
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To unfailingly arrange a seal member for sealing a storage container along the storage container with less labor in a thermal treatment device even when a dimensional tolerance of the storage container for storing processed objects is large.SOLUTION: A thermal treatment device 1 includes: a tube 2; a second annular seal member 22; and a seal holding device 71. The second seal member 22 is formed by using an elastic material and fits in an outer peripheral surface 11a of an opening part 11 of the tube 2. The seal holding device 71 includes: receiving members 74 arranged in a circumferential direction C1; and a receiving member holding mechanism 73 which holds the receiving members 74. Each receiving member 74 receives part of the second seal member 22 in the circumferential direction C1. The receiving member holding mechanism 73 is formed so as to adjust positions of the respective receiving members 74 in a radial direction R1.SELECTED DRAWING: Figure 4
Inventors:
KASATSUGU KATSUNAO
NISHIMURA KEISUKE
URASAKI YOSHIHIKO
IKEDA SHINICHI
NAKANISHI HIRONARI
NISHIMURA KEISUKE
URASAKI YOSHIHIKO
IKEDA SHINICHI
NAKANISHI HIRONARI
Application Number:
JP2016102999A
Publication Date:
October 27, 2016
Filing Date:
May 24, 2016
Export Citation:
Assignee:
KOYO THERMO SYS KK
International Classes:
F27B5/06; F27D7/06; H01L21/205; H01L21/22; H01L21/324
Domestic Patent References:
| JPS60159585A | 1985-08-21 | |||
| JP2003074709A | 2003-03-12 | |||
| JPS6028396U | 1985-02-26 | |||
| JP2005235936A | 2005-09-02 | |||
| JP2003214771A | 2003-07-30 | |||
| JPH04269822A | 1992-09-25 |
Attorney, Agent or Firm:
Patent Corporation Wandee ip Partners