Title:
THERMAL TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2019096894
Kind Code:
A
Abstract:
To improve durability of a door opening and closing mechanism of a horizontal furnace in a thermal treatment device.SOLUTION: A thermal treatment device 1 comprises: a horizontal furnace 3 which has laterally arranged opening section 7a and a door 2; and an opening and closing mechanism 6 to open and close the door 2. The opening and closing mechanism 6 has: a linear motion actuator 34 which has an output section 39 configured to move in a straight line and is horizontally arranged; and a link mechanism 35. The link mechanism 35: converts linear motion of the output section 39 into swaying motion around a predetermined first axial line S1 extended in a vertical direction; and transmits the swaying motion to the door 2.SELECTED DRAWING: Figure 1
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Inventors:
IKEDA SHINICHI
UMEDA FUMIO
NISHIOKA MASAHIRO
URASAKI YOSHIHIKO
UMEDA FUMIO
NISHIOKA MASAHIRO
URASAKI YOSHIHIKO
Application Number:
JP2019011733A
Publication Date:
June 20, 2019
Filing Date:
January 25, 2019
Export Citation:
Assignee:
KOYO THERMO SYS KK
International Classes:
H01L21/31; C23C16/44; F27B5/06; F27D1/18; H01L21/205; H01L21/22; H01L21/324
Attorney, Agent or Firm:
Patents corporation Blitas