Title:
THERMAL TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2019135442
Kind Code:
A
Abstract:
To cool an opening/closing mechanism for opening and closing a door of a horizontal furnace with a simpler structure in a thermal treatment device.SOLUTION: A thermal treatment device 1 includes: a horizontal furnace 3 having an opening 7a horizontally disposed and a door 2; an opening and closing mechanism 6 for opening and closing the door 2; and a scavenger part 12 which encloses a periphery of the opening 7a and is used to generate airflow in the periphery of the opening 7a. The scavenger part 12 includes a cooling opening 8. An introduction part 31 of the cooling opening 8 is provided so as to cause a cooling gas to flow in the scavenger part 12, and a part of the opening and closing mechanism 6 is disposed in the introduction part 31.SELECTED DRAWING: Figure 1
Inventors:
IKEDA SHINICHI
UMEDA FUMIO
NISHIOKA MASAHIRO
URASAKI YOSHIHIKO
UMEDA FUMIO
NISHIOKA MASAHIRO
URASAKI YOSHIHIKO
Application Number:
JP2019072346A
Publication Date:
August 15, 2019
Filing Date:
April 04, 2019
Export Citation:
Assignee:
KOYO THERMO SYS KK
International Classes:
F27D9/00; F27B5/06; F27D1/18; F27D7/06; H01L21/22; H01L21/324
Attorney, Agent or Firm:
Patents corporation Blitas