Title:
熱処理装置および熱処理方法
Document Type and Number:
Japanese Patent JP4468555
Kind Code:
B2
Inventors:
Mutsumi Eshima
Koichi Sakamoto
Koichi Sakamoto
Application Number:
JP2000222051A
Publication Date:
May 26, 2010
Filing Date:
July 24, 2000
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/46; H01L21/205; F27B5/14; F27D11/02; H01L21/22; H01L21/31
Domestic Patent References:
| JP9148315A | ||||
| JP4234119A |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka